Papers Submitted to WSEAS Conferences and WSEAS Journals: Wseas Transactions

Tuesday, 16 June 2009

Wseas Transactions

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The following information was submitted:

Transactions: WSEAS TRANSACTIONS ON SYSTEMS AND CONTROL
Transactions ID Number: 32-560
Full Name: Jium-ming Lin
Position: Professor
Age: ON
Sex: Male
Address: 707, Sec. 2 Wu-Fu rd. Hsin-Chu
Country: TAIWAN
Tel: 886-3518-6483
Tel prefix: 886
Fax: 886-3518-6521
E-mail address: jmlin@chu.edu.tw
Other E-mails:
Title of the Paper: ELIMINATING HYSTERESIS EFFECT OF FORCE ACTUATOR IN A SPM
Authors as they appear in the Paper: jium-ming lin and po-kwang chang
Email addresses of all the authors: jmlin@chu.edu.tw, puppy@itri.org.tw
Number of paper pages: 15
Abstract: This research is to use fuzzy controller to eliminate hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implementation to reduce the hysteresis effect of the force actuator. Comparisons with two previous designs with and without Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also made. Thus the new system design is cheaper and valuable.
Keywords: SPM, LVT, LVDT, Fuzzy controller, PI compensator, Force actuator, Hysteresis effect
EXTENSION of the file: .pdf
Special (Invited) Session:
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