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Transactions: WSEAS TRANSACTIONS ON MATHEMATICS
Transactions ID Number: 31-499
Full Name: Saeed Rastegar
Position: Ph.D. Candidate
Age: ON
Sex: Male
Address: Department of Electrical and Mechanical Engineering, Babol University of Technology P.O. 484, Babol, Iran.
Country: IRAN
Tel: +91 11 1329-9214
Tel prefix: +91 11 1329-9214
Fax: +91 11 1329-9214
E-mail address: s.rastegar36@gmail.com
Other E-mails: asghar_gholamian@nit.ac.ir
Title of the Paper: Application of homotopy-perturbation method to the Estimation of Electric Potential in 2D Plate With Infinite Length
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Number of paper pages: 10
Abstract: In this paper, He's variational iteration method (VIM) is used to analyze the deflection of polysilicon diaphragm of Micro Electro Mechanical Systems (MEMS) capacitive microphone. The residual stresses in the material used to make the diaphragm change the vibrational characteristics of the microphone diaphragm and consequently influence the microphone's first resonant frequency, cutoff frequency and sensitivity. The most successful devices use polysilicon as a diaphragm material, because of its residual stress is controllable by high temperature annealing after ion implantation by boron or phosphorous. External acoustic force causes to deflect the diaphragm of the structure and VIM is a powerful analytical method to predict the structural behavior and the microphone performance. Comparison of this new method with the previous approximate solution [1], is applied to assure us about the accuracy of solution.
Keywords: polysilicon diaphragm, MEMS capacitive microphone, variational iteration method (VIM), acoustic force.
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