The following information was submitted:
Transactions: WSEAS TRANSACTIONS ON ELECTRONICS
Transactions ID Number: 88-150
Full Name: Josef Lazar
Position: Associate Professor
Age: ON
Sex: Male
Address: Kralovopolska 147, 612 64 Brno
Country: CZECH REPUBLIC
Tel:
Tel prefix:
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E-mail address: joe@isibrno.cz
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Title of the Paper: Laser interferometric measuring system for positioning in nanometrology
Authors as they appear in the Paper: Josef Lazar, Ondrej Cip, Martin Cizek, Jan Hrabina, Mojmir Sery, and Petr Klapetek
Email addresses of all the authors: joe@isibrno.cz, ocip@isibrno.cz, cizek@isibrno.cz, shane@isibrno.cz, sery@isibrno.cz, pklapetek@cmi.cz
Number of paper pages: 10
Abstract: In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology.
Keywords: Nanometrology, Interferometry, Traceability, Local probe microscopy, Nanopositioning
EXTENSION of the file: .pdf
Special (Invited) Session: Multiaxis interferometric system for positioning in nanometrology
Organizer of the Session: 645-354
How Did you learn about congress: Otakar Wilfert, wilfert@feec.vutbr.cz; Pavel Tomanek, tomanek@feec.vutbr.cz
IP ADDRESS: 195.178.70.10
