The following information was submitted:
Transactions: INTERNATIONAL JOURNAL of MATHEMATICS AND COMPUTERS IN SIMULATION
Transactions ID Number: 19-888
Full Name: Yanping Bai
Position: Professor
Age: ON
Sex: Female
Address: Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China.
Country: CHINA
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E-mail address: baiyp666@163.com
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Title of the Paper: performance analysis of micro-cantilever beams and sensor data fitting
Authors as they appear in the Paper: Bai Yanping, Hao Yilong
Email addresses of all the authors: baiyp666@163.com
Number of paper pages: 9
Abstract: This paper investigates the specimen size influence on bending strength of microstructures cantilever beams. The vertical bending deflection of microfabricated polysilicon beams was evaluated. Because the original data contain noise terms, the data should be processed via wavelets analysis. The experiment results takes into account the effect of device geometry and elastic properties of the specimens, and agrees well with the results obtained by the theoretical line model for small deflection. The vertical deflection increases with increase in the beam length for a fixed beam width and thickness, decreases with increase in the beam width for a fixed beam length and thickness. And when vertical deflections of specimens are about less than 800nm, the relationship of force and deflection are linear. For larger displacements, non-linear terms will appear in the force-displacement relationship. On the other hand, we used autoregressive models and genetic ARMA mode!
l to fit a set of sensor data. Fitting results show following conclusions. In the case of fitting model to determine, the regression model gets only a fitting curve. And yet genetic ARMA model of can get different the fitting parameters by adjusting the parameters of genetic algorithm, which provides an effective method according to different accuracy fitting curve
Keywords: Artificial neural network, Cantilever beam, Micro-electro-mechanical system, Wavelet transformation, data fitting.
EXTENSION of the file: .doc
Special (Invited) Session: Static Deflections Analysis of Micro-Cantilevers beam under Transverse Loading
Organizer of the Session: 202-247
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