Papers Submitted to WSEAS Conferences and WSEAS Journals: Wseas Transactions

Thursday 23 September 2010

Wseas Transactions

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The following information was submitted:

Transactions: INTERNATIONAL JOURNAL of COMPUTERS
Transactions ID Number: 19-449
Full Name: CHITANU ELENA
Position: Engineer
Age: ON
Sex: Female
Address: Splaiul Unirii Nr. 313 Bucharest
Country: ROMANIA
Tel:
Tel prefix:
Fax:
E-mail address: elena_petrache@icpe-ca.ro
Other E-mails:
Title of the Paper: Obtaining thin layers of ZnO with magnetron sputtering method
Authors as they appear in the Paper: Chitanu Elena, Ionita Gheorghe
Email addresses of all the authors: elena_petrache@icpe-ca.ro, ionitateacher@yahoo.com
Number of paper pages: 12
Abstract: This paper presents research results on the obtaining of ZnO thin layers using a method of physical vapor deposition, namely magnetron sputtering. They used two types of ZnO targets sintered and non sintered. Deposit layers was done by magnetron sputtering method in argon atmosphere. Rigorous characterization of the deposited layers was performed by analysis of electron microscopy SEM and HRTEM.
Keywords: Magnetron sputtering, Thin films, ZnO
EXTENSION of the file: .doc
Special (Invited) Session: Obtaining thin layers of ZnO with magnetron sputtering method
Organizer of the Session: 201-408
How Did you learn about congress:
IP ADDRESS: 193.226.105.98

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